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"Anisotropic Etching"
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Etching Processes
MEMS and Nanotechnology Clearinghouse. Etching Processes. In order to form a functional MEMS structure on a substrate, it is necessary to etch the thin films previously deposited and/or the ...
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Simulation of Anisotropic Crystal Etching
Simulation of Anisotropic Crystal Etching. Bill Foote. CSD-90-595. September 12, 1990. A series of programs have been developed to model anisotropic etching of crystalline substances.
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Anisotropic Etching
Anisotropic Etching. Etching in which the vertical etch rate is greater than the horizontal etch rate.
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